Invention Grant
- Patent Title: Semiconductor device having engineering change order (ECO) cells and method of using
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Application No.: US15815289Application Date: 2017-11-16
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Publication No.: US10553575B2Publication Date: 2020-02-04
- Inventor: Li-Chun Tien , Ya-Chi Chou , Hui-Zhong Zhuang , Chun-Fu Chen , Ting-Wei Chiang , Hsiang Jen Tseng
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Hauptman Ham, LLP
- Main IPC: H01L27/02
- IPC: H01L27/02 ; H01L27/118 ; G06F17/50

Abstract:
A semiconductor device includes an array of Engineering Change Order (ECO) cells. Each of the ECO cells in the array includes a first metal pattern and a second metal pattern. Each of the ECO cells in the array further includes a plurality of active area patterns isolated from each other and arranged between the first and second metal patterns. Each of the ECO cells in the array further includes a first central metal pattern overlapping the first metal pattern. Each of the ECO cells in the array further includes a via electrically connecting the first central metal pattern to the first metal pattern. The plurality of active area patterns is arranged symmetrically about the first central metal pattern.
Public/Granted literature
- US20180076190A1 SEMICONDUCTOR DEVICE HAVING ENGINEERING CHANGE ORDER (ECO) CELLS AND METHOD OF USING Public/Granted day:2018-03-15
Information query
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