Invention Grant
- Patent Title: Vertical-type memory device
-
Application No.: US15938101Application Date: 2018-03-28
-
Publication No.: US10553606B2Publication Date: 2020-02-04
- Inventor: Jong Won Kim , Hyun Goo Jun
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2017-0095397 20170727
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/1157 ; H01L23/522 ; H01L23/528 ; H01L27/11565

Abstract:
A vertical-type memory device and a manufacturing method thereof, the device including a substrate having a cell array region and a connection region; gate electrode layers stacked on the cell array region and the connection region of the substrate, the gate electrode layers forming a stepped structure in the connection region; a cell channel layer in the cell array region, the cell channel layer passing through the plurality of gate electrode layers; a dummy channel layer in the connection region, the dummy channel layer passing through at least one gate electrode layer of the plurality of gate electrode layers; a cell epitaxial layer disposed below the cell channel layer; and a dummy epitaxial layer disposed below the dummy channel layer, wherein the dummy epitaxial layer has a shape that is different from a shape of the cell epitaxial layer.
Public/Granted literature
- US20190035804A1 VERTICAL-TYPE MEMORY DEVICE Public/Granted day:2019-01-31
Information query
IPC分类: