Invention Grant
- Patent Title: Metal insulator metal capacitor
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Application No.: US14103651Application Date: 2013-12-11
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Publication No.: US10553672B2Publication Date: 2020-02-04
- Inventor: Yan-Jhih Huang , Chun-Yuan Hsu , Chien-Chung Chen , Yung-Hsieh Lin
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Hauptman Ham, LLP
- Main IPC: H01L49/02
- IPC: H01L49/02 ; H01L23/522

Abstract:
A metal-insulator-metal (MIM) capacitor includes a semiconductor substrate and a capacitor device. The capacitor device includes a first conductor upright on the semiconductor substrate, a second conductor upright on the semiconductor substrate, and an insulator disposed used for insulating the first conductor from the second conductor. In a method for fabricating the capacitor device, a mask including a test line pattern and a capacitor pattern with a first trench pattern and a second trench pattern is used to form a test line and the first conductor and the second conductor of the capacitor device, thereby decreasing the cost of for fabricating the MIM capacitor.
Public/Granted literature
- US20150162398A1 METAL INSULATOR METAL CAPACITOR Public/Granted day:2015-06-11
Information query
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