Invention Grant
- Patent Title: Acoustic sensor and capacitive transducer
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Application No.: US15808712Application Date: 2017-11-09
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Publication No.: US10555087B2Publication Date: 2020-02-04
- Inventor: Yuki Uchida
- Applicant: OMRON Corporation
- Applicant Address: JP Kyoto
- Assignee: Omron Corporation
- Current Assignee: Omron Corporation
- Current Assignee Address: JP Kyoto
- Agency: Osha Liang LLP
- Priority: JP2016-240655 20161212
- Main IPC: H04R9/08
- IPC: H04R9/08 ; B81B3/00

Abstract:
An acoustic sensor has a semiconductor substrate having an opening, a back plate that is disposed facing the opening of the semiconductor substrate, that is configured to function as a fixed electrode, and that has sound holes that allow passage of air, a vibration electrode film disposed facing the back plate through a void, and a casing configured to house the substrate, the back plate, and the vibration electrode film, and having a pressure hole that allows inflow of air. The acoustic sensor converts transformation of the vibration electrode film into a change in capacitance between the vibration electrode film and the back plate to detect sound pressure.
Public/Granted literature
- US20180167740A1 ACOUSTIC SENSOR AND CAPACITIVE TRANSDUCER Public/Granted day:2018-06-14
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