Invention Grant
- Patent Title: Temperature control system and process for gaseous precursor delivery
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Application No.: US15835615Application Date: 2017-12-08
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Publication No.: US10557203B2Publication Date: 2020-02-11
- Inventor: David K. Carlson
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C16/448 ; F25B21/02 ; C23C16/52 ; H01L21/02

Abstract:
Systems, methods and an apparatus used for delivery of chemical precursors, and more particularly to an ampoule for containing chemical precursors are provided. In one implementation, an apparatus for generating a chemical precursor used in a vapor deposition processing system is provided. The apparatus comprises a canister comprising a sidewall, a top, and a bottom surface encompassing an interior volume therein, an adhesion layer disposed over an outside surface of the sidewall and bottom surface, a thermally conductive coating disposed over the adhesion layer, an insulator layer disposed over the thermally conductive coating, wherein the thermally conductive coating over the bottom surface remains exposed and an inlet port and an outlet port in fluid communication with the interior volume.
Public/Granted literature
- US20180163307A1 PRECURSOR CONTROL SYSTEM AND PROCESS Public/Granted day:2018-06-14
Information query
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