Invention Grant
- Patent Title: Methods of fabricating semiconductor memory devices
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Application No.: US15952350Application Date: 2018-04-13
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Publication No.: US10559571B2Publication Date: 2020-02-11
- Inventor: Eunjung Kim , Daeik Kim , Bong-Soo Kim , Jemin Park , Semyeong Jang , Yoosang Hwang
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2017-0048085 20170413; KR10-2017-0056869 20170504
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L27/108 ; H01L21/768 ; B08B7/00

Abstract:
A method of fabricating a semiconductor memory device includes forming a bit line and a bit line capping pattern on the semiconductor substrate, forming a first spacer covering a sidewall of the bit line capping pattern and a sidewall of the bit line, forming a contact plug in contact with a sidewall of the first spacer and having a top surface that is lower than an upper end of the first spacer, removing an upper portion of the first spacer, forming a first sacrificial layer closing at least an entrance of the void, forming a second spacer covering the sidewall of the bit line capping pattern and having a bottom surface in contact with a top surface of the first spacer, and removing the first sacrificial layer. The bit line capping pattern is on the bit line. The contact plug includes a void exposed on the top surface.
Public/Granted literature
- US20180301459A1 METHODS OF FABRICATING SEMICONDUCTOR MEMORY DEVICES Public/Granted day:2018-10-18
Information query
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