Invention Grant
- Patent Title: Methods of forming gate contact over active region for vertical FinFET, and structures formed thereby
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Application No.: US16018970Application Date: 2018-06-26
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Publication No.: US10559686B2Publication Date: 2020-02-11
- Inventor: Ruilong Xie , Hui Zang , Steven R. Soss
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent Anthony Canale
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/06 ; H01L27/06 ; H01L29/66 ; H01L29/08

Abstract:
Methods of making a vertical FinFET device having an electrical path over a gate contact landing, and the resulting device including a substrate having a bottom S/D layer thereover and fins extending vertically therefrom; a bottom spacer layer over the bottom S/D layer; a HKMG layer over the bottom spacer layer; a top spacer layer over the HKMG layer; a top S/D layer on top of each fin; top S/D contacts formed over the top S/D layer; an upper ILD layer present in spaces around the top S/D contacts; an isolation dielectric within a portion of a recess of top S/D contacts located above adjacent fins; a gate contact landing within a remaining portion of the recess; a gate contact extending vertically from a bottom surface of the gate contact landing and contacting a portion of the HKMG layer; and an electrical path over at least the gate contact landing.
Public/Granted literature
- US20190393342A1 METHODS OF FORMING GATE CONTACT OVER ACTIVE REGION FOR VERTICAL FINFET, AND STRUCTURES FORMED THEREBY Public/Granted day:2019-12-26
Information query
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