Invention Grant
- Patent Title: Variable conductance gas distribution apparatus and method
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Application No.: US15489453Application Date: 2017-04-17
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Publication No.: US10561975B2Publication Date: 2020-02-18
- Inventor: John Kevin Shugrue
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holdings B.V.
- Current Assignee: ASM IP Holdings B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- Main IPC: B01D53/04
- IPC: B01D53/04 ; F16K1/32 ; C23C16/455 ; B01D53/047 ; F04B39/10 ; F16K1/38
Abstract:
Variable conductance gas distribution systems, reactors and systems including the variable conductance gas distribution systems, and methods of using the variable conductance gas distribution systems, reactors, and systems are disclosed. The variable conductance gas distribution systems allow rapid manipulation of gas-flow conductance through the gas distribution system.
Public/Granted literature
- US20170216762A1 VARIABLE CONDUCTANCE GAS DISTRIBUTION APPARATUS AND METHOD Public/Granted day:2017-08-03
Information query
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