发明授权
- 专利标题: Semiconductor device and a corresponding method of manufacturing semiconductor devices
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申请号: US16048108申请日: 2018-07-27
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公开(公告)号: US10566283B2公开(公告)日: 2020-02-18
- 发明人: Samuele Sciarrillo , Paolo Colpani , Ivan Venegoni
- 申请人: STMICROELECTRONICS S.R.L.
- 申请人地址: IT Agrate Brianza
- 专利权人: STMICROELECTRONICS S.R.L.
- 当前专利权人: STMICROELECTRONICS S.R.L.
- 当前专利权人地址: IT Agrate Brianza
- 代理机构: Seed Intellectual Property Law Group LLP
- 优先权: IT102017000087201 20170728
- 主分类号: H01L23/528
- IPC分类号: H01L23/528 ; H01L23/532 ; H01L21/768 ; H01L23/31 ; H01L23/00 ; H01L23/525
摘要:
A semiconductor device includes a passivation layer, an interconnection metallization 37 having a peripheral portion over the passivation layer, and an outer surface coating 37 on the interconnection metallization. A diffusion barrier layer comprises an inner planar portion directly on the surface of the passivation layer and a peripheral portion extending along a plane at a vertical height higher than the surface of the passivation layer, so that the peripheral portion forms with the inner portion a step in the barrier layer. The outer surface coating, has a vertical wall with a foot adjacent to the peripheral portion and positioned at the vertical height over the surface of the passivation layer to form a hollow recess area between the surface of the passivation layer and both of the peripheral portion and the foot of the outer surface coating.
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