Invention Grant
- Patent Title: System and method for transport
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Application No.: US14676982Application Date: 2015-04-02
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Publication No.: US10570516B2Publication Date: 2020-02-25
- Inventor: Rick C. Powell
- Applicant: First Solar, Inc.
- Applicant Address: US AZ Tempe
- Assignee: First Solar, Inc.
- Current Assignee: First Solar, Inc.
- Current Assignee Address: US AZ Tempe
- Agency: MacMillan, Sobanski & Todd, LLC
- Main IPC: C23C16/458
- IPC: C23C16/458 ; C03B35/18 ; C23C16/44 ; C23C16/455 ; C23C16/54 ; H01L21/677
Abstract:
A deposition system and method includes a deposition source, a roll conveyor and at least one shield positioned at a location proximate to the deposition source.
Public/Granted literature
- US20150203963A1 SYSTEM AND METHOD FOR TRANSPORT Public/Granted day:2015-07-23
Information query
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