Invention Grant
- Patent Title: Apparatus and method for producing gallium oxide crystal
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Application No.: US15470547Application Date: 2017-03-27
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Publication No.: US10570528B2Publication Date: 2020-02-25
- Inventor: Keigo Hoshikawa , Takumi Kobayashi , Etsuko Ohba , Jun Yanagisawa
- Applicant: SHINSHU UNIVERSITY , Fujikoshi Machinery Corp.
- Applicant Address: JP Nagano JP Nagano
- Assignee: SHINSHU UNIVERSITY,FUJIKOSHI MACHINERY CORP.
- Current Assignee: SHINSHU UNIVERSITY,FUJIKOSHI MACHINERY CORP.
- Current Assignee Address: JP Nagano JP Nagano
- Agency: Stites & Harbison, PLLC
- Agent Stephen J. Weyer, Esq.
- Priority: JP2016-085153 20160421
- Main IPC: C30B11/00
- IPC: C30B11/00 ; C30B29/16 ; H01L21/02

Abstract:
The apparatus for producing a gallium oxide crystal relating to the invention contains a vertical Bridgman furnace containing: a base body; a cylindrical furnace body having heat resistance disposed above the base body; a lid member occluding the furnace body; a heater disposed inside the furnace body; a crucible shaft provided vertically movably through the base body; and a crucible disposed on the crucible shaft, heated with the heater, the crucible is a crucible containing a Pt-based alloy, the furnace body has an inner wall that is formed as a heat-resistant wall containing plural ring shaped heat-resistant members each having a prescribed height accumulated on each other, and the ring shaped heat-resistant members each contain plural divided pieces that are joined to each other to the ring shape.
Public/Granted literature
- US20170306521A1 APPARATUS AND METHOD FOR PRODUCING GALLIUM OXIDE CRYSTAL Public/Granted day:2017-10-26
Information query
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