Invention Grant
- Patent Title: Method of performing metrology operations and system thereof
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Application No.: US16179700Application Date: 2018-11-02
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Publication No.: US10571406B2Publication Date: 2020-02-25
- Inventor: Ron Katzir , Imry Kissos , Lavi Shachar , Amit Batikoff , Shaul Cohen , Noam Zac
- Applicant: Applied Materials Israel Ltd.
- Applicant Address: IL Rehovot
- Assignee: Applied Materials Israel Ltd.
- Current Assignee: Applied Materials Israel Ltd.
- Current Assignee Address: IL Rehovot
- Agency: Lowenstein Sandler LLP
- Main IPC: G01N21/95
- IPC: G01N21/95

Abstract:
One or more metrology objects and one or more metrology operations may be identified. A design-based representation of a first metrology object of the one or more metrology objects may be received. Furthermore, an image-based representation of the first metrology object of the one or more metrology objects may be received where the one or more metrology operations include a first metrology operation associated with the first metrology object that is to be performed on the image-based representation of the first metrology object. The design-based representation of the first metrology object may be mapped with the image-based representation of the first metrology object. The first metrology operation may be performed based on the mapping.
Public/Granted literature
- US20190121933A1 METHOD OF PERFORMING METROLOGY OPERATIONS AND SYSTEM THEREOF Public/Granted day:2019-04-25
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