Invention Grant
- Patent Title: Sensor of volatile substances and process for manufacturing a sensor of volatile substances
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Application No.: US15795609Application Date: 2017-10-27
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Publication No.: US10571421B2Publication Date: 2020-02-25
- Inventor: Antonello Santangelo , Salvatore Cascino , Roberto Modica , Viviana Cerantonio , Maurizio Moschetti , Alessandro Auditore
- Applicant: STMicroelectronics S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed Intellectual Property Law Group LLP
- Priority: ITTO2014A0074 20140131
- Main IPC: G01N27/22
- IPC: G01N27/22 ; G01N27/00

Abstract:
A sensor of volatile substances includes: a first electrode structure and a second electrode structure capacitively coupled, comb-fingered, and arranged coplanar in a plane; and a sensitive layer, of a sensitive material that is permeable to a volatile substance and has electrical permittivity depending upon a concentration of the volatile substance absorbed by the sensitive material. The sensitive layer extends from opposite sides of the plane.
Public/Granted literature
- US20180052132A1 SENSOR OF VOLATILE SUBSTANCES AND PROCESS FOR MANUFACTURING A SENSOR OF VOLATILE SUBSTANCES Public/Granted day:2018-02-22
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