Invention Grant
- Patent Title: Quality factor compensation in microelectromechanical system (MEMS) gyroscopes
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Application No.: US15869163Application Date: 2018-01-12
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Publication No.: US10578435B2Publication Date: 2020-03-03
- Inventor: James Lin , Ronald A. Kapusta, Jr. , Lijun Gao
- Applicant: Analog Devices, Inc.
- Applicant Address: US MA Norwood
- Assignee: Analog Devices, Inc.
- Current Assignee: Analog Devices, Inc.
- Current Assignee Address: US MA Norwood
- Agency: Wolf, Greenfield & Sacks, P.C.
- Main IPC: G01C19/56
- IPC: G01C19/56 ; B81B3/00

Abstract:
Circuits and methods for compensating microelectromechanical system (MEMS) gyroscopes for quality factor variations are described. Quality factor variations arise when mechanical losses are introduced in the gyroscope's resonator, for example due to thermoelastic damping or squeeze-film damping, which may hinder the gyroscope's ability to accurately sense angular velocity. Quality factor compensation may be performed by generating a compensation signal having a time decay rate that depends on the quality factor of resonator. In this way, artifacts that may otherwise arise in gyroscope's output are limited. Additionally, or alternatively, quality factor compensation may be performed by controlling the force with which the gyroscope's resonator is driven. This may be achieved, for example, by controlling the average value of the drive signal.
Public/Granted literature
- US20190219394A1 QUALITY FACTOR COMPENSATION IN MICROELECTROMECHANICAL SYSTEM (MEMS) GYROSCOPES Public/Granted day:2019-07-18
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