- 专利标题: Method for producing field-effect transistor
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申请号: US16131760申请日: 2018-09-14
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公开(公告)号: US10586873B2公开(公告)日: 2020-03-10
- 发明人: Shinji Matsumoto , Naoyuki Ueda , Yuki Nakamura , Yukiko Abe , Yuji Sone , Ryoichi Saotome , Sadanori Arae , Minehide Kusayanagi
- 申请人: Shinji Matsumoto , Naoyuki Ueda , Yuki Nakamura , Yukiko Abe , Yuji Sone , Ryoichi Saotome , Sadanori Arae , Minehide Kusayanagi
- 申请人地址: JP Tokyo
- 专利权人: Ricoh Company, Ltd.
- 当前专利权人: Ricoh Company, Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2016-055630 20160318; JP2017-038178 20170301
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L21/16 ; H01L29/786 ; H01L21/02 ; H01L27/12 ; H01L29/04 ; H01L29/24 ; H01L51/00
摘要:
A method for producing a field-effect transistor including first-oxide-layer and second-oxide-layer and forming front-channel or back-channel in region where the first-oxide-layer and the second-oxide-layer are adjacent to each other, the method including: forming second-precursor-layer, which is precursor of the second-oxide-layer, so as to be in contact with first-precursor-layer, which is precursor of the first-oxide-layer, and then converting the first-precursor-layer and the second-precursor-layer to the first-oxide-layer and the second-oxide-layer, respectively, the forming includes at least one of treatments (I) and (II) below: (I) treatment of: coating first-oxide-precursor-forming coating liquid that can form precursor of first oxide and contains solvent; and then removing the solvent to form the first-precursor-layer which is the precursor of the first-oxide-layer; and (II) treatment of: coating second-oxide-precursor-forming coating liquid that can form precursor of second oxide and contains solvent; and then removing the solvent to form the second-precursor-layer which is the precursor of the second-oxide-layer.
公开/授权文献
- US20190027608A1 METHOD FOR PRODUCING FIELD-EFFECT TRANSISTOR 公开/授权日:2019-01-24
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