- 专利标题: Deterministic quantum emitter operating at room temperature in optical communication wavelength using intersubband transition of nitride-based semiconductor quantum dot, method of fabricating same, and operating method thereof
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申请号: US16036556申请日: 2018-07-16
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公开(公告)号: US10586887B2公开(公告)日: 2020-03-10
- 发明人: Yong-Hoon Cho , Hwanseop Yeo , JongHoi Cho
- 申请人: Korea Advanced Institute of Science and Technology
- 申请人地址: KR Daejeon
- 专利权人: Korea Advanced Institute of Science and Technology
- 当前专利权人: Korea Advanced Institute of Science and Technology
- 当前专利权人地址: KR Daejeon
- 代理机构: Miller, Matthias & Hull LLP
- 优先权: KR10-2017-0091368 20170719
- 主分类号: H01L33/06
- IPC分类号: H01L33/06 ; H01L33/00 ; H01L33/08 ; H01L33/24 ; H01L33/38 ; G06F21/31 ; H01L33/32 ; G06N10/00 ; H01L27/15
摘要:
Disclosed are a deterministic quantum emitter operating at room temperature in an optical communication wavelength using the intersubband transition of a nitride-based semiconductor quantum dot, a method of fabricating the same, and an operating method thereof. A method of fabricating a quantum emitter includes forming a three-dimensional (3-D) structure in a substrate, forming an n type-doped thin film at the upper part of the 3-D structure, forming a quantum dot over the n type-doped thin film, regrowing the 3-D structure in order to use the 3-D structure as an optical structure, depositing a metal thin film at a vertex of the 3-D structure, and connecting electrodes to an n type-doped area and the metal thin film, respectively. A carrier may be captured in the quantum dot by applying a voltage to the connected electrodes. The quantum emitter may be driven by optically exciting the quantum dot.
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