Invention Grant
- Patent Title: Method of manufacturing display apparatus utilizing mask assembly including intermediate layer and self-assembled monolayer
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Application No.: US15176669Application Date: 2016-06-08
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Publication No.: US10590533B2Publication Date: 2020-03-17
- Inventor: Jaesik Kim , Wooyong Sung
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2015-0150267 20151028
- Main IPC: C23C14/04
- IPC: C23C14/04 ; C23C16/455 ; C23C14/56 ; C23C14/34 ; C23C16/04 ; H01L51/56 ; B05D1/32 ; H01L51/52
Abstract:
A mask assembly includes a mask including an opening forming a pattern, an intermediate layer disposed on at least a portion of the mask, and a self-assembled monolayer (SAM) disposed on at least a portion of the intermediate layer.
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