Invention Grant
- Patent Title: Confocal displacement sensor
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Application No.: US16296264Application Date: 2019-03-08
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Publication No.: US10591278B2Publication Date: 2020-03-17
- Inventor: Shoma Kuga
- Applicant: Keyence Corporation
- Applicant Address: JP Osaka
- Assignee: Keyence Corporation
- Current Assignee: Keyence Corporation
- Current Assignee Address: JP Osaka
- Agency: Kilyk & Bowersox, P.L.L.C.
- Priority: JP2015-254807 20151225
- Main IPC: G01B11/06
- IPC: G01B11/06 ; G01B11/00 ; G01D5/34 ; G01D5/26

Abstract:
To provide a confocal displacement sensor capable of easily and accurately measuring displacement of a measurement object. Light having a chromatic aberration is converged by a lens unit 220 and irradiated on a measurement object S from a measurement head 200. Light having a wavelength reflected while focusing on the surface of the measurement object S passes through the optical fiber 314 in the measurement head 200. The light passed through the optical fiber 314 is guided to a spectral section 130 in a processing device 100 and spectrally dispersed. In the processing device 100, the light spectrally dispersed by the spectral section 130 is received by a light receiving section 140. A light reception signal output from the light receiving section 140 is acquired by a control section 152. The control section 152 measures displacement on the basis of the acquired light reception signal and gives the light reception signal to a PC 600 on the outside. A CPU 601 of the PC 600 causes a display section 700 to display, as change information, a change from a light reception signal acquired at a point in time before a present point in time to a light reception signal acquired at the present point in time.
Public/Granted literature
- US20190204071A1 Confocal Displacement Sensor Public/Granted day:2019-07-04
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