Invention Grant
- Patent Title: Light guide, detector having light guide, and charged particle beam device
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Application No.: US16082745Application Date: 2017-02-03
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Publication No.: US10593512B2Publication Date: 2020-03-17
- Inventor: Yoshifumi Sekiguchi , Shin Imamura , Hajime Kawano , Shahedul Hoque
- Applicant: Hitachi High-Technologies Corporation
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- Priority: JP2016-069943 20160331
- International Application: PCT/JP2017/003884 WO 20170203
- International Announcement: WO2017/169101 WO 20171005
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/26 ; H01J37/244 ; H01J37/28

Abstract:
The present invention provides a light guide capable of guiding light generated by a scintillator at high efficiency to a photoreceiving element, a detector, and a charged particle beam device. For attaining the purpose, the present invention proposes a light guide that guides light generated by a scintillator to a photoreceiving element, provided with a scintillator containment portion formed of a first surface facing a surface opposite to a charged particle incident surface of the scintillator and a second surface facing a surface different from the surface opposite to the charged particle incident surface of the scintillator, and a tilted surface reflecting light incident from the second surface to the inside of the light guide.
Public/Granted literature
- US20190115186A1 Light Guide, Detector Having Light Guide, and Charged Particle Beam Device Public/Granted day:2019-04-18
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