- 专利标题: Pressure sensing element
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申请号: US15890846申请日: 2018-02-07
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公开(公告)号: US10598558B2公开(公告)日: 2020-03-24
- 发明人: Seong Hyun Kim , Su Jae Lee , Kyoung Ik Cho , Chi-Sun Hwang
- 申请人: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- 申请人地址: KR Daejeon
- 专利权人: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- 当前专利权人: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- 当前专利权人地址: KR Daejeon
- 代理机构: Rabin & Berdo, P.C.
- 优先权: KR10-2017-0026630 20170228; KR10-2017-0086657 20170707
- 主分类号: G01L9/00
- IPC分类号: G01L9/00 ; G01L1/18 ; G01L19/06 ; G01L1/16
摘要:
Provided is a pressure sensing element including a first electrode, a pressure sensing unit on the first electrode, a second electrode disposed on the pressure sensing unit and having first and second points on a top surface thereof, a first elastic member on the second electrode, and a second elastic member on the first elastic electrode, wherein a thickness of the first elastic member decreases from the first point toward the second point, and a thickness of the second elastic member increases from the second point toward the first point.
公开/授权文献
- US20180246000A1 PRESSURE SENSING ELEMENT 公开/授权日:2018-08-30
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