- 专利标题: Scanning probe microscope and light intensity adjusting method
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申请号: US16290391申请日: 2019-03-01
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公开(公告)号: US10598691B2公开(公告)日: 2020-03-24
- 发明人: Kazuma Watanabe , Keita Fujino , Eiji Iida , Masato Hirade , Kenji Yamasaki , Hideo Nakajima , Yuichiro Ikeda , Hiroshi Arai
- 申请人: Shimadzu Corporation
- 申请人地址: JP Nishinokyo-Kuwabaracho, Nakagyo-ku, Kyoto-shi, Kyoto
- 专利权人: Shimadzu Corporation
- 当前专利权人: Shimadzu Corporation
- 当前专利权人地址: JP Nishinokyo-Kuwabaracho, Nakagyo-ku, Kyoto-shi, Kyoto
- 代理机构: Muir Patent Law, PLLC
- 优先权: JP2018-083791 20180425
- 主分类号: G01Q20/02
- IPC分类号: G01Q20/02 ; G01Q30/18 ; G01Q30/04 ; G01Q10/06
摘要:
A scanning probe microscope includes a light source, a detector, a housing, an opening and closing door, an opening and closing sensor, a control unit, and the like. The opening and closing door is provided in the housing. The control unit 16 also functions as the light intensity change processing unit 164. In the scanning probe microscope, when the opening and closing sensor detects opening and closing of the opening and closing door, the light intensity change processing unit automatically changes the intensity of light irradiated from the light source based on a detection result of the opening and closing sensor. Therefore, it is possible to omit light intensity adjustment work performed manually by the user. As a result, the workability of the user when using the scanning probe microscope 1 can be improved.
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