Invention Grant
- Patent Title: Infrared sensor and method for cooling bolometer infrared ray receiver of infrared sensor
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Application No.: US16193152Application Date: 2018-11-16
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Publication No.: US10605667B2Publication Date: 2020-03-31
- Inventor: Takashi Kawasaki , Kouhei Takahashi , Naoki Tambo , Yasuyuki Naito
- Applicant: Panasonic Intellectual Property Management Co., Ltd.
- Applicant Address: JP Osaka
- Assignee: Panasonic Intellectual Property Management Co., Ltd.
- Current Assignee: Panasonic Intellectual Property Management Co., Ltd.
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2017-236574 20171211
- Main IPC: G01J5/06
- IPC: G01J5/06 ; G01J5/20 ; H01L37/02 ; H01L35/32 ; H01L37/00 ; G01J5/08

Abstract:
An infrared sensor comprises a base substrate including a recess, a bolometer infrared ray receiver, and a Peltier device. The bolometer infrared ray receiver comprises a resistance variable layer, a bolometer first beam, and a bolometer second beam. The Peltier device comprises a Peltier first beam formed of a p-type semiconductor material and a Peltier second beam formed of an n-type semiconductor material. The Peltier device is in contact with a back surface of the bolometer infrared ray receiver. One end of each of the bolometer first beam, the bolometer second beam, the Peltier first beam, and the Peltier second beam is connected to the base substrate. The bolometer infrared ray receiver and the Peltier device are suspended above the base substrate. Each of the bolometer first beam, the bolometer second beam, the Peltier first beam, and the Peltier second beam has a phononic crystal structure including a plurality of through holes arranged regularly.
Public/Granted literature
- US20190178718A1 INFRARED SENSOR AND METHOD FOR COOLING BOLOMETER INFRARED RAY RECEIVER OF INFRARED SENSOR Public/Granted day:2019-06-13
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