Invention Grant
- Patent Title: Optical measurement apparatus and recording medium
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Application No.: US16170878Application Date: 2018-10-25
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Publication No.: US10627291B2Publication Date: 2020-04-21
- Inventor: Manabu Kojima
- Applicant: YOKOGAWA ELECTRIC CORPORATION , Yokogawa Test & Measurement Corporation
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: YOKOGAWA ELECTRIC CORPORATION,Yokogawa Test & Measurement Corporation
- Current Assignee: YOKOGAWA ELECTRIC CORPORATION,Yokogawa Test & Measurement Corporation
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: Osha Liang LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@617c8257
- Main IPC: G01J3/453
- IPC: G01J3/453 ; G01J3/02

Abstract:
An optical measurement apparatus includes: a moving mirror that changes an optical path length of one of two beams generated by splitting light subject to measurement; a drive mechanism that causes the moving mirror to reciprocate a predetermined distance in linear motion; a measured light receiver that detects intensity of light generated by superimposing the two beams; and a computation processor that sets a plurality of measurement ranges within the predetermined distance and calculates a measurement value based on a change in the light intensity detected by the measured light receiver for each of the measurement ranges.
Public/Granted literature
- US10663347B2 Optical measurement apparatus and recording medium Public/Granted day:2020-05-26
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