Invention Grant
- Patent Title: Generating high resolution images from low resolution images for semiconductor applications
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Application No.: US15396800Application Date: 2017-01-02
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Publication No.: US10648924B2Publication Date: 2020-05-12
- Inventor: Jing Zhang , Grace Hsiu-Ling Chen , Kris Bhaskar , Keith Wells , Nan Bai , Ping Gu , Lisheng Gao
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corp.
- Current Assignee: KLA-Tencor Corp.
- Current Assignee Address: US CA Milpitas
- Agent Ann Marie Mewherter
- Main IPC: G01N21/95
- IPC: G01N21/95 ; G06K9/68 ; G06K9/62 ; G06K9/46 ; G06T3/40

Abstract:
Methods and systems for generating a high resolution image for a specimen from one or more low resolution images of the specimen are provided. One system includes one or more computer subsystems configured for acquiring one or more low resolution images of a specimen. The system also includes one or more components executed by the one or more computer subsystems. The one or more components include a model that includes one or more first layers configured for generating a representation of the one or more low resolution images. The model also includes one or more second layers configured for generating a high resolution image of the specimen from the representation of the one or more low resolution images.
Public/Granted literature
- US20170193680A1 GENERATING HIGH RESOLUTION IMAGES FROM LOW RESOLUTION IMAGES FOR SEMICONDUCTOR APPLICATIONS Public/Granted day:2017-07-06
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