Invention Grant
- Patent Title: Chip handling and electronic component integration
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Application No.: US16551377Application Date: 2019-08-26
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Publication No.: US10658182B2Publication Date: 2020-05-19
- Inventor: Russell A. Budd , Qianwen Chen , Bing Dang , Jeffrey D. Gelorme , Li-wen Hung , John U. Knickerbocker
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Otterstedt, Wallace & Kammer, LLP
- Agent Jeffrey Kelly
- Main IPC: H01L21/20
- IPC: H01L21/20 ; B24B7/22 ; H01L21/683 ; H01L23/544 ; H01L23/498 ; H01L21/56

Abstract:
Small size chip handling and electronic component integration are accomplished using handle fixturing to transfer die or other electronic components from a full area array to a targeted array. Area array dicing of a thinned device wafer on a handle wafer/panel may be followed by selective or non-selective de-bonding of targeted die or electronic components from the handle wafer and optional attachment to a carrier such as a transfer head or tape. Alignment fiducials may facilitate precision alignment of the transfer head or tape to the device wafer and subsequently to the targeted array. Alternatively, the dies or other electronic elements are transferred selectively from either a carrier or the device wafer to the targeted array.
Information query
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