- 专利标题: Vertical fin type bipolar junction transistor (BJT) device with a self-aligned base contact
-
申请号: US16157928申请日: 2018-10-11
-
公开(公告)号: US10658495B2公开(公告)日: 2020-05-19
- 发明人: Injo Ok , Choonghyun Lee , Soon-Cheon Seo , Sungjae Lee
- 申请人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 代理机构: Tutunjian & Bitetto, P.C.
- 代理商 Vazken Alexanian
- 主分类号: H01L29/73
- IPC分类号: H01L29/73 ; H01L29/08 ; H01L29/66 ; H01L29/205 ; H01L29/225 ; H01L21/324 ; H01L21/477 ; H01L21/02 ; H01L29/737 ; H01L29/165
摘要:
A method of forming a silicon-germanium heterojunction bipolar transistor (hbt) device is provided. The method includes forming a stack of four doped semiconductor layers on a semiconductor substrate. The method further includes forming a dummy emitter contact and contact spacers on a fourth doped semiconductor layer of the stack of four doped semiconductor layers, and removing portions of the second, third, and fourth semiconductor layers to form a vertical fin. The method further includes recessing the second and fourth doped semiconductor layers, and depositing a condensation layer on the second, third, and fourth doped semiconductor layers. The method further includes reacting the condensation layer with the third doped semiconductor layer to form a protective segment on a condensed protruding portion.
信息查询
IPC分类: