- 专利标题: Semiconductor device, semiconductor wafer, module, electronic device, and manufacturing method thereof
-
申请号: US16377405申请日: 2019-04-08
-
公开(公告)号: US10658519B2公开(公告)日: 2020-05-19
- 发明人: Hajime Kimura , Shunpei Yamazaki
- 申请人: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- 申请人地址: JP Atsugi-shi, Kanagawa-ken
- 专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人地址: JP Atsugi-shi, Kanagawa-ken
- 代理机构: Fish & Richardson P.C.
- 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3db21b60
- 主分类号: H01L29/786
- IPC分类号: H01L29/786 ; H01L27/12 ; H01L21/02 ; H01L21/324 ; H01L21/78
摘要:
A semiconductor device including a highly reliable transistor is provided. A semiconductor device includes a transistor. The transistor includes first and second gate electrodes, first and second gate insulators, a source electrode, a drain electrode, first to sixth oxides, first and second layers, and first and second gate insulators. The third oxide is under the source electrode. The fourth oxide is under the drain electrode. The sixth oxide is under the second gate electrode. The third and fourth oxides each have a function of supplying oxygen to the second oxide. The sixth oxide has a function of supplying oxygen to the second gate insulator.
公开/授权文献
信息查询
IPC分类: