• Patent Title: Method for producing an optoelectronic semiconductor chip and optoelectronic semiconductor chip
  • Application No.: US16085934
    Application Date: 2017-03-16
  • Publication No.: US10658548B2
    Publication Date: 2020-05-19
  • Inventor: Fabian KoppAttila Molnar
  • Applicant: OSRAM OLED GMBH
  • Applicant Address: DE Regensburg
  • Assignee: OSRAM OLED GMBH
  • Current Assignee: OSRAM OLED GMBH
  • Current Assignee Address: DE Regensburg
  • Agency: MH2 Technology Law Group, LLP
  • Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@12bc0838
  • International Application: PCT/EP2017/056281 WO 20170316
  • International Announcement: WO2017/158113 WO 20170921
  • Main IPC: H01L33/46
  • IPC: H01L33/46 H01L33/38 H01L33/42
Method for producing an optoelectronic semiconductor chip and optoelectronic semiconductor chip
Abstract:
A method for producing an optoelectronic semiconductor chip is specified, wherein a method step A) involves providing a semiconductor layer stack comprising a semiconductor layer of a first type, a semiconductor layer of a second type and an active layer arranged between the semiconductor layer of the first type and the semiconductor layer of the second type. Furthermore, the method comprises in a method step B) forming a mesa structure in the semiconductor layer of the first type, the semiconductor layer of the second type and the active layer. The method furthermore comprises in a method step C) applying a passivation layer to the mesa structure by means of vapour deposition or sputtering.
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