Invention Grant
- Patent Title: Piezoelectric actuator, piezoelectric motor, robot, and electronic component conveyance apparatus
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Application No.: US15661306Application Date: 2017-07-27
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Publication No.: US10658950B2Publication Date: 2020-05-19
- Inventor: Yutaka Arakawa , Tomoaki Takahashi , Noboru Furuya , Yuichiro Tsuyuki
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@b56c859
- Main IPC: H02N2/00
- IPC: H02N2/00 ; H02N2/10 ; B25J9/12 ; B65G47/90

Abstract:
A piezoelectric actuator includes a vibrating plate having a piezoelectric material, and a contact part provided in an end portion of the vibrating plate in contact with a driven part, wherein the contact part has a first portion in contact with the driven part and a second portion provided between the first portion and the vibrating plate and having lower rigidity than the first portion. Further, a width of the second portion in a direction crossing an arrangement direction of the first portion and the second portion is smaller than a width of the first portion in the crossing direction.
Public/Granted literature
- US20180034387A1 PIEZOELECTRIC ACTUATOR, PIEZOELECTRIC MOTOR, ROBOT, AND ELECTRONIC COMPONENT CONVEYANCE APPARATUS Public/Granted day:2018-02-01
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