Invention Grant
- Patent Title: Method for transferring graphene
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Application No.: US16072758Application Date: 2016-06-23
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Publication No.: US10661542B2Publication Date: 2020-05-26
- Inventor: Yong Ki Kim
- Applicant: CHARMGRAPHENE CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: CHARMGRAPHENE CO., LTD.
- Current Assignee: CHARMGRAPHENE CO., LTD.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Rabin & Berdo, P.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@66b7f62f
- International Application: PCT/KR2016/006683 WO 20160623
- International Announcement: WO2017/131302 WO 20170803
- Main IPC: B32B37/00
- IPC: B32B37/00 ; B32B38/00 ; C23F1/00 ; B65H37/04 ; C23F1/02 ; B65H41/00 ; B65H18/08 ; B32B9/00 ; C23F1/08 ; B82Y40/00 ; H01L29/16 ; B32B38/10

Abstract:
A method for transferring graphene according to an exemplary embodiment of the present invention includes a process of transferring graphene of a metal sheet onto a thermal release film in each vacuum chamber and a process of transferring the graphene of the thermal release film onto a base material substrate. According to the method for transferring graphene, adhesion is increased by removing bubbles or foreign substances at the time of transferring the graphene to prevent separation of the graphene at the time of etching a metal substrate and enhance an adhesive quality state of the graphene on a target substrate.
Public/Granted literature
- US20190061328A1 METHOD FOR TRANSFERRING GRAPHENE Public/Granted day:2019-02-28
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