Invention Grant
- Patent Title: Method of manufacturing a structure having one or several strained semiconducting zones that may for transistor channel regions
-
Application No.: US15457447Application Date: 2017-03-13
-
Publication No.: US10665497B2Publication Date: 2020-05-26
- Inventor: Emmanuel Augendre , Nicolas Loubet , Sylvain Maitrejean , Pierre Morin
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES , STMICROELECTRONICS Inc
- Applicant Address: FR Paris US TX Coppell
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES,STMICROELECTRONICS Inc
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES,STMICROELECTRONICS Inc
- Current Assignee Address: FR Paris US TX Coppell
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@41fd8fe
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L21/762 ; H01L21/02 ; H01L29/78 ; H01L29/66 ; H01L29/786 ; H01L21/18 ; H01L29/16 ; H01L21/8238 ; H01L29/161

Abstract:
The method of manufacturing a structure comprising one or several strained semiconducting zones capable of forming one or several transistor channel regions, the method including the following steps: a) providing a substrate coated with a masking layer wherein there are one or several first slits exposing one or several first oblong semiconducting portions made of a first semiconducting material and extending in a first direction, b) making a second semiconducting material grow with a mesh parameter different from the mesh parameter of the first semiconducting material, so as to form one or several first semiconducting blocks strained along the first direction, on said one or several first oblong semiconducting portions.
Public/Granted literature
- US20170263495A1 CO-MANUFACTURING METHOD OF ZONES WITH DIFFERENT UNIAXIAL STRESSES Public/Granted day:2017-09-14
Information query
IPC分类: