- 专利标题: Semiconductor memory device and method of fabricating the same
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申请号: US16108786申请日: 2018-08-22
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公开(公告)号: US10665592B2公开(公告)日: 2020-05-26
- 发明人: Jungwoo Song , Kwangmin Kim , Jun Ho Lee , Hyuckjin Kang , Yong Kwan Kim , Sangyeon Han , Seguen Park
- 申请人: SAMSUNG ELECTRONICS CO., LTD.
- 申请人地址: KR Suwon-si, Gyeonggi-Do
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Suwon-si, Gyeonggi-Do
- 代理机构: F. Chau & Associates, LLC
- 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@651c7ad5
- 主分类号: H01L29/06
- IPC分类号: H01L29/06 ; H01L27/108 ; H01L23/532 ; H01L27/24 ; H01L27/22
摘要:
Provided are a semiconductor memory device and a method of fabricating the same. The semiconductor memory device may include: a first impurity doped region and a second impurity doped region spaced apart from each other in a semiconductor substrate, a bit line electrically connected to the first impurity doped region and crossing over the semiconductor substrate, a storage node contact electrically connected to the second impurity doped region, a first spacer and a second spacer disposed between the bit line and the storage node contact, and an air gap region disposed between the first spacer and the second spacer. The first spacer may cover a sidewall of the bit line, and the second spacer may be adjacent to the storage node contact. A top end of the first spacer may have a height higher than a height of a top end of the second spacer.
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