- 专利标题: Techniques for co-integrating transition metal dichalcogenide (TMDC)-based and III-N semiconductor-based transistor devices
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申请号: US15771752申请日: 2015-12-02
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公开(公告)号: US10665707B2公开(公告)日: 2020-05-26
- 发明人: Han Wui Then , Sansaptak Dasgupta , Marko Radosavljevic
- 申请人: INTEL CORPORATION
- 申请人地址: US CA Santa Clara
- 专利权人: INTEL CORPORATION
- 当前专利权人: INTEL CORPORATION
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Finch & Maloney PLLC
- 国际申请: PCT/US2015/063341 WO 20151202
- 国际公布: WO2017/095400 WO 20170608
- 主分类号: H01L29/778
- IPC分类号: H01L29/778 ; H01L29/267 ; H01L29/20 ; H01L29/24 ; H01L21/8258 ; H01L27/092
摘要:
Techniques are disclosed for co-integrating transition metal dichalcogenide (TMDC)-based p-channel transistor devices and III-N semiconductor-based n-channel transistor devices. In accordance with some embodiments, a p-channel transistor device configured as described herein may include a layer of TMDC material such as, for example, tungsten diselenide, tungsten disulfide, molybdenum diselenide, or molybdenum disulfide, and an n-channel transistor device configured as described herein may include a layer of III-V material such as, for example, gallium nitride, aluminum nitride, aluminum gallium nitride, and indium aluminum nitride. Transistor structures provided as described herein may be utilized, for instance, in power delivery applications where III-N semiconductor-based n-channel power transistor devices can benefit from being integrated with low-leakage, high-performance p-channel devices providing logic and control circuitry. In some cases, a TMDC-based transistor provided as described herein may exhibit p-channel mobility in excess of bulk Si and thus may exhibit faster performance than traditional Si-based p-channel transistors.
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