Configuring optical layers in imprint lithography processes
Abstract:
An imprint lithography method of configuring an optical layer includes selecting one or more parameters of a nanolayer to be applied to a substrate for changing an effective refractive index of the substrate and imprinting the nanolayer on the substrate to change the effective refractive index of the substrate such that a relative amount of light transmittable through the substrate is changed by a selected amount.
Public/Granted literature
Information query
Patent Agency Ranking
0/0