- 专利标题: Integrated circuit and method for manufacturing the same
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申请号: US15935277申请日: 2018-03-26
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公开(公告)号: US10672783B2公开(公告)日: 2020-06-02
- 发明人: Yun-Chi Wu , Cheng-Bo Shu , Chien Hung Liu
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Eschweiler & Potashnik, LLC
- 主分类号: H01L29/792
- IPC分类号: H01L29/792 ; H01L27/1157 ; H01L29/66 ; H01L27/11573 ; H01L29/08 ; H01L29/49 ; H01L21/28 ; H01L29/423 ; H01L29/51
摘要:
Various embodiments of the present application are directed to an integrated circuit (IC) comprising a memory cell with a large operation window and a high erase speed. In some embodiments, the IC comprises a semiconductor substrate and a memory cell. The memory cell comprises a control gate electrode, a select gate electrode, a charge trapping layer, and a common source/drain region. The common source/drain is defined by the semiconductor substrate and is n-type. The control gate electrode and the select gate electrode overlie the semiconductor substrate and are respectively on opposite sides of the common source/drain. Further, the control gate electrode overlies the charge trapping layer and comprises a metal with a p-type work function. In some embodiments, the select gate electrode comprises a metal with an n-type work function.
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