发明授权
- 专利标题: Semiconductor memory device
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申请号: US16293809申请日: 2019-03-06
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公开(公告)号: US10672784B2公开(公告)日: 2020-06-02
- 发明人: Shunsuke Kasashima
- 申请人: TOSHIBA MEMORY CORPORATION
- 申请人地址: JP Minato-ku
- 专利权人: TOSHIBA MEMORY CORPORATION
- 当前专利权人: TOSHIBA MEMORY CORPORATION
- 当前专利权人地址: JP Minato-ku
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@467178a7
- 主分类号: H01L23/52
- IPC分类号: H01L23/52 ; H01L21/44 ; H01L27/1157 ; H01L27/11582 ; H01L27/11573
摘要:
A semiconductor memory device according to an embodiment includes: a substrate; a plurality of first gate electrodes; a first semiconductor film facing the plurality of first gate electrodes; a first gate insulating film provided between the plurality of first gate electrodes and the first semiconductor film; a plurality of second gate electrodes that are further from the substrate than the plurality of first gate electrodes; a second semiconductor film facing the plurality of second gate electrodes; a second gate insulating film provided between the plurality of second gate electrodes and the second semiconductor film; a third gate electrode provided between the plurality of first gate electrodes and the plurality of second gate electrodes; a third semiconductor film facing the third gate electrode; and a third gate insulating film provided between the third gate electrode and the third semiconductor film, a width in a second direction of the third semiconductor film being larger than that of a one end of the second semiconductor film, and smaller than that of the other end of the first semiconductor film.
公开/授权文献
- US20200075607A1 SEMICONDUCTOR MEMORY DEVICE 公开/授权日:2020-03-05
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