Invention Grant
- Patent Title: Vertical memory device
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Application No.: US15942683Application Date: 2018-04-02
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Publication No.: US10685973B2Publication Date: 2020-06-16
- Inventor: Moon Kyu Song , Ki Yoon Kang , Jae Hoon Jang
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@46c06bdf
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11565 ; H01L27/1157 ; H01L27/11575 ; H01L27/11556 ; H01L27/11578 ; H01L27/11551 ; H01L23/00

Abstract:
A vertical memory device includes a substrate including a cell array region and a connection region adjacent to the cell array region, a plurality of gate electrode layers stacked on the cell array region and the connection region of the substrate, a channel structure on the cell array region and extending in a direction perpendicular to an upper surface of the substrate while penetrating through the plurality of gate electrode layers, a dummy channel structure on the connection region and extending in the direction perpendicular to the upper surface of the substrate while penetrating through at least a portion of the plurality of gate electrode layers, and a support insulating layer between a portion of the plurality of gate electrode layers and the dummy channel structure. The plurality of gate electrode form a stepped structure on the connection region.
Public/Granted literature
- US20190067321A1 VERTICAL MEMORY DEVICE Public/Granted day:2019-02-28
Information query
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