Invention Grant
- Patent Title: Gas injection apparatus with heating channels
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Application No.: US15859035Application Date: 2017-12-29
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Publication No.: US10689757B2Publication Date: 2020-06-23
- Inventor: Lara Hawrylchak , Agus Sofian Tjandra , Emre Cuvalci
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01M8/04
- IPC: H01M8/04 ; C23C16/455 ; C23C16/458

Abstract:
A gas injection apparatus for a thermal processing chamber includes a gas injector having an inlet at a first end and a port at a second end; and a plate having a first opening matching the port, one or more second openings, and at least one circuitous flow path defined by the plate and fluidly connecting the first opening to the one or more second openings.
Public/Granted literature
- US20180187305A1 GAS INJECTION APPARATUS WITH HEATING CHANNELS Public/Granted day:2018-07-05
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