Invention Grant
- Patent Title: Mold manufacturing method and anti-reflective film manufacturing method
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Application No.: US15524385Application Date: 2015-10-30
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Publication No.: US10695955B2Publication Date: 2020-06-30
- Inventor: Nobuaki Yamada , Hidekazu Hayashi , Miho Yamada
- Applicant: Sharp Kabushiki Kaisha
- Applicant Address: JP Sakai, Osaka
- Assignee: SHARP KABUSHIKI KAISHA
- Current Assignee: SHARP KABUSHIKI KAISHA
- Current Assignee Address: JP Sakai, Osaka
- Agency: ScienBiziP, P.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@865b074
- International Application: PCT/JP2015/080777 WO 20151030
- International Announcement: WO2016/072362 WO 20160512
- Main IPC: C25D11/04
- IPC: C25D11/04 ; B29C33/38 ; B29C59/02 ; C25D11/12 ; G02B1/118 ; B29C37/00 ; B29C33/42 ; C25D11/24 ; B29C33/72 ; C25D11/10 ; C25D11/08

Abstract:
A manufacturing method of a mold, the mold having at its surface a plurality of recessed portions whose two-dimensional size is not less than 10 nm and less than 500 nm when viewed in a direction normal to the surface, the method comprising: (a) providing a mold base (10); (b) partially anodizing the aluminum alloy layer (18), thereby forming a porous alumina layer (14) which has a plurality of minute recessed portions (14p); (c) bringing the porous alumina layer into contact with an etching solution, thereby enlarging the plurality of minute recessed portions; (d) detecting a protrusion (210) formed at a surface of the porous alumina layer or the mold base; (e) determining whether or not a height of the detected protrusion is greater than a predetermined height; and (f) if it is determined at step (e) that the height of the protrusion is greater, irradiating the protrusion with laser light such that the height of the protrusion becomes smaller than the predetermined height.
Public/Granted literature
- US20180281238A1 MOLD MANUFACTURING METHOD AND ANTI-REFLECTIVE FILM MANUFACTURING METHOD Public/Granted day:2018-10-04
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