发明授权
- 专利标题: FinFET semiconductor structure with equal pitches and fabrication method thereof
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申请号: US15961621申请日: 2018-04-24
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公开(公告)号: US10699939B2公开(公告)日: 2020-06-30
- 发明人: Hua Yong Hu , Yi Shih Lin
- 申请人: Semiconductor Manufacturing International (Shanghai) Corporation , Semiconductor Manufacturing International (Beijing) Corporation
- 申请人地址: CN Shanghai CN Beijing
- 专利权人: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- 当前专利权人: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- 当前专利权人地址: CN Shanghai CN Beijing
- 代理机构: Anova Law Group, PLLC
- 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@14c68b77
- 主分类号: H01L21/762
- IPC分类号: H01L21/762 ; H01L21/308 ; H01L29/66 ; H01L21/3065 ; H01L27/088 ; H01L21/311
摘要:
Semiconductor structure and fabrication method are provided. The method includes: providing a substrate including device regions and isolation regions, adjacent with one another; providing discrete fins on the substrate, pitches between adjacent fins being substantially same; forming a protective layer on the sidewalls of the fins; removing a partial thickness of the fins in the isolation regions along with a partial thickness of the protective layer in the isolation regions by a first etching process; forming dummy fins by a second etching process to etch the remaining fins in the isolation regions using the remaining protective layers as a mask; removing the remaining protective layer after the second etching process; and forming isolation structures in the isolation regions on the substrate. The isolation structures have a top lower than the fins in the device regions and higher than the dummy fins in the isolation regions.
公开/授权文献
- US20180308746A1 SEMICONDUCTOR STRUCTURE AND FABRICATION METHOD THEREOF 公开/授权日:2018-10-25
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