Invention Grant
- Patent Title: Textured membrane for a multi-chamber carrier head
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Application No.: US15264412Application Date: 2016-09-13
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Publication No.: US10702971B2Publication Date: 2020-07-07
- Inventor: Jeonghoon Oh , Tsz-Sin Siu , Hung Chih Chen , Andrew J. Nagengast , Steven M. Zuniga , Thomas B. Brezoczky
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: B24B37/30
- IPC: B24B37/30 ; B24B41/06 ; B29C35/02 ; B29C33/42 ; B29L31/00 ; B29K23/00 ; B29K83/00
Abstract:
A flexible membrane for use in a carrier head has a generally circular main portion with a lower surface, an annular outer portion for connection to a base assembly, and an annular flap extending from the main portion on a side opposite the lower surface for connection to the base assembly. At least one surface of the flap has a surface texture to prevent adhesion.
Public/Granted literature
- US20170001282A1 TEXTURED MEMBRANE FOR A MULTI-CHAMBER CARRIER HEAD Public/Granted day:2017-01-05
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