Invention Grant
- Patent Title: Three-dimensional measurement device
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Application No.: US15820816Application Date: 2017-11-22
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Publication No.: US10704888B2Publication Date: 2020-07-07
- Inventor: Hiroyuki Ishigaki , Takahiro Mamiya
- Applicant: CKD Corporation
- Applicant Address: JP Aichi
- Assignee: CKD CORPORATION
- Current Assignee: CKD CORPORATION
- Current Assignee Address: JP Aichi
- Agency: Osha Liang LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@5cbfaaed com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3ef954a2 com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@6e8205a5
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01B11/24 ; G01J3/02 ; H01L21/66 ; H05K3/00

Abstract:
A three-dimensional measurement device includes an optical system that: splits an incident light into two lights; radiates one light to a measurement object and the other light to a reference surface; and emits the combined light; a first irradiator that emits a first light that comprises a polarized light of a first wavelength and enters a first element of the optical system; a second irradiator that emits a second light that comprises a polarized light of a second wavelength and enters a second element of the optical system; a first camera that takes an image of the first light emitted from the second element when the first light enters the first element; a second camera that takes an image of the second light emitted from the first element when the second light enters the second element; and an image processor that performs measurement based on the images.
Public/Granted literature
- US20180106590A1 THREE-DIMENSIONAL MEASUREMENT DEVICE Public/Granted day:2018-04-19
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