Invention Grant
- Patent Title: Extraction body for lithographic apparatus
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Application No.: US16097640Application Date: 2017-04-05
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Publication No.: US10705426B2Publication Date: 2020-07-07
- Inventor: Gijs Kramer , Martijn Houben , Nicholas Peter Waterson , Thibault Simon Mathieu Laurent , Yuri Johannes Gabriël Van De Vijver , Marcus Martinus Petrus Adrianus Vermeulen , Simon Karel Ravensbergen , Vincentius Fransiscus Cloosterman , Siegfried Alexander Tromp , Coen Hubertus Matheus Baltis , Justin Johannes Hermanus Gerritzen , Niek Jacobus Johannes Roset
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman, LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@15fa7c2
- International Application: PCT/EP2017/058076 WO 20170405
- International Announcement: WO2017/194247 WO 20171116
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
An extraction body for a support apparatus of a lithographic apparatus. The support apparatus is configured to support an object. The extraction body is formed with an opening at a surface thereof. The opening extends within the extraction body forming a first passageway. The first passageway is configured to fluidly communicate an extraction channel in the extraction body to liquid between the surface and the object. A first pressure in the extraction channel is less than ambient pressure. At least a part of the first passageway is sized and dimensioned such that when the liquid enters the first passageway via the opening, a second pressure in the first passageway associated with surface tension of the liquid is lower than the first pressure such that at least a portion of the liquid is retained in the first passageway.
Public/Granted literature
- US20190163066A1 EXTRACTION BODY FOR LITHOGRAPHIC APPARATUS Public/Granted day:2019-05-30
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