Invention Grant
- Patent Title: Substrate treating apparatus and substrate treating method
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Application No.: US15677321Application Date: 2017-08-15
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Publication No.: US10707101B2Publication Date: 2020-07-07
- Inventor: Heehwan Kim , Sul Lee
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Chungcheongnam-Do
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Chungcheongnam-Do
- Agency: Carter, DeLuca & Farrell LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@67cfee4f
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/687

Abstract:
Disclosed are a substrate treating apparatus and a substrate treating method. The substrate treating apparatus including a spin head configured to support the substrate, a nozzle configured to discharge a chemical to the substrate located on the spin head, a first passage configured to supply a first chemical, a chemical property of which is the same as the chemical, a second passage configured to supply a second chemical, a chemical property of which is the same as the first chemical, and a discharge passage connecting the first passage and the second passage, and the nozzle.
Public/Granted literature
- US20180061675A1 SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD Public/Granted day:2018-03-01
Information query
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