Invention Grant
- Patent Title: Product method of thin-film transistor, thin-film transistor, display apparatus, and fingerprint recognition unit
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Application No.: US15793299Application Date: 2017-10-25
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Publication No.: US10720512B2Publication Date: 2020-07-21
- Inventor: Yingwei Liu
- Applicant: BOE Technology Group Co., Ltd.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Westman, Champlin & Koehler, P.A.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@58b84a59
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/786 ; G06K9/00 ; H01L27/12 ; H01L29/49

Abstract:
This disclosure discloses a production method of a thin-film transistor, a thin-film transistor, a display apparatus, and a fingerprint recognition unit. Said method comprises the steps of: sequentially depositing a metal layer and an indium zinc oxide layer as a protective layer on a substrate; etching the metal layer and the indium zinc oxide layer to form a first electrode and a second electrode of a photosensitive device; and forming a photoelectric semiconductor of the photosensitive device on the first electrode.
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Information query
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