Invention Grant
- Patent Title: Source material for electronic device applications
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Application No.: US16436501Application Date: 2019-06-10
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Publication No.: US10731273B2Publication Date: 2020-08-04
- Inventor: John Mark Meldrim , Yushi Hu , Yongjun Jeff Hu , Everett Allen McTeer
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Schwegman Lundberg & Woessner, P.A.
- Main IPC: C30B29/38
- IPC: C30B29/38 ; H01L27/11556 ; H01L29/792 ; H01L27/11582 ; C30B23/02 ; C30B25/02 ; H01L21/225 ; H01L27/11524 ; H01L27/1157

Abstract:
Various embodiments include methods and apparatuses comprising methods for formation of and apparatuses including a source material for electronic devices. One such apparatus includes a vertical string of memory cells comprising a plurality of alternating levels of conductor and dielectric material, a semiconductor material extending through the plurality of alternating levels of conductor material and dielectric material, and a source material coupled to the semiconductor material. The source material includes a titanium nitride layer and a source polysilicon layer in direct contact with the titanium nitride layer. Other methods and apparatuses are disclosed.
Public/Granted literature
- US20190360120A1 SOURCE MATERIAL FOR ELECTRONIC DEVICE APPLICATIONS Public/Granted day:2019-11-28
Information query
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