Invention Grant
- Patent Title: Contact and interconnect structures
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Application No.: US15897416Application Date: 2018-02-15
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Publication No.: US10741497B2Publication Date: 2020-08-11
- Inventor: Jim Shih-Chun Liang
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Calderon Safran & Cole, P.C.
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: H01L29/94
- IPC: H01L29/94 ; H01L23/535 ; H01L23/538 ; H01L21/768

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to contact and interconnect structures and methods of manufacture. The structure includes: a single damascene contact structure in electrical contact with a contact of a source region or drain region; and a single damascene interconnect structure in a wiring layer and in direct electrical contact with the single damascene contact structure.
Public/Granted literature
- US20190252320A1 CONTACT AND INTERCONNECT STRUCTURES Public/Granted day:2019-08-15
Information query
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