Invention Grant
- Patent Title: Division mask with clamping portion
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Application No.: US15672662Application Date: 2017-08-09
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Publication No.: US10741763B2Publication Date: 2020-08-11
- Inventor: Daewon Baek , Jongbum Kim
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3181f913
- Main IPC: H01L51/00
- IPC: H01L51/00 ; H05K3/12 ; B05C17/08 ; B05C21/00 ; C23C14/04 ; H05B33/10 ; B05B12/20 ; B05D1/32

Abstract:
A division mask includes a main body including at least one opening pattern, and a clamping portion at an edge of the main body, the clamping portion having an increasing width with respect to an increasing distance from the main body, and the clamping portion including a fan-out portion extending from the main body and including at least one dummy pattern, and at least one branch portion having a decreasing width with respect to an increasing distance from the fan-out portion.
Public/Granted literature
- US20180065143A1 DIVISION MASK Public/Granted day:2018-03-08
Information query
IPC分类: