- Patent Title: Confocal surface topography measurement with fixed focal positions
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Application No.: US16379707Application Date: 2019-04-09
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Publication No.: US10746540B2Publication Date: 2020-08-18
- Inventor: Erez Lampert , Adi Levin , Tal Verker
- Applicant: Align Technology, Inc.
- Applicant Address: US CA San Jose
- Assignee: Align Technology, Inc.
- Current Assignee: Align Technology, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Lowenstein Sandler LLP
- Main IPC: G01B11/25
- IPC: G01B11/25 ; G01S17/08 ; A61C9/00 ; G02B3/00 ; G02B21/00 ; G02B23/26 ; G01B11/24 ; G01B11/30 ; G02B23/24

Abstract:
An apparatus is described for measuring surface topography of a three-dimensional structure. In many embodiments, the apparatus is configured to focus each of a plurality of light beams to a respective fixed focal position relative to the apparatus. The apparatus measures a characteristic of each of a plurality of returned light beams that are generated by illuminating the three-dimensional structure with the light beams. The characteristic is measured for a plurality of different positions and/or orientations between the apparatus and the three-dimensional structure. Surface topography of the three-dimensional structure is determined based at least in part on the measured characteristic of the returned light beams for the plurality of different positions and/or orientations between the apparatus and the three-dimensional structure.
Public/Granted literature
- US20200041263A1 CONFOCAL SURFACE TOPOGRAPHY MEASUREMENT WITH FIXED FOCAL POSITIONS Public/Granted day:2020-02-06
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