- 专利标题: Imprint apparatus and method for producing article
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申请号: US15360307申请日: 2016-11-23
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公开(公告)号: US10751920B2公开(公告)日: 2020-08-25
- 发明人: Hiroshi Sato
- 申请人: CANON KABUSHIKI KAISHA
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Canon U.S.A., Inc. I.P. Division
- 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@796c394c
- 主分类号: B29C43/58
- IPC分类号: B29C43/58 ; G03F7/00 ; G03F9/00 ; B29C43/02 ; B29C43/36 ; G03F7/20
摘要:
An imprint apparatus for forming a pattern of an imprint material on a substrate using a mold includes a plurality of alignment scopes and a control unit. The control unit controls aligning of a shot region of the substrate and the mold based on outputs from the plurality of alignment scopes. Each of the plurality of alignment scopes outputs information indicating a relative position of a first mark selected from a plurality of first marks in the shot region and a second mark selected from a plurality of second marks on the mold. The control unit controls aligning of the shot region and the mold based on information excluding incorrect information from a plurality of pieces of information output from the plurality of alignment scopes.
公开/授权文献
- US20170151694A1 IMPRINT APPARATUS AND METHOD FOR PRODUCING ARTICLE 公开/授权日:2017-06-01
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